Publication | Closed Access

Implementation and analysis of an automated multiscale measurement strategy for wafer scale inspection of micro electromechanical systems

Electrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationMeasurementMicro Electromechanical SystemsMechanical EngineeringStructural Health MonitoringMicroelectromechanical SystemsEducationPrecision Mechanical TestingInstrumentationWafer Scale InspectionSystem MeasurementMeasurement SystemMicro-electromechanical SystemMultiscale Modeling