Improved signal model for confocal sensors accounting for object depending artifacts

Florian Mauch, Wolfram Lyda, Marc Gronle, +1

Optics Express

EngineeringSensor ArrayMeasurementConventional Signal ModelEducation +19

itom: an open source metrology, automation, and data evaluation software

Marc Gronle, Wolfram Lyda, Marc Wilke, +2

Applied Optics

EngineeringMeasurementEducationComputer-aided DesignReal-time Data +26

Advantages of chromatic-confocal spectral interferometry in comparison to chromatic confocal microscopy

Wolfram Lyda, Marc Gronle, David Fleischle, +2

Measurement Science and Technology

EngineeringMicroscopyChromatic-confocal Spectral InterferometryInterferometryChromatic Confocal Microscopy +15

Optical metrology: from the laboratory to the real world

W. Osten, Eugenio Garbusi, David Fleischle, +4

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringMicroscopyMeasurementOptical TestingInterferometry +14

Open-source graphics processing unit–accelerated ray tracer for optical simulation

Florian Mauch, Marc Gronle, Wolfram Lyda, +1

Optical Engineering

Optical DesignRealistic RenderingEngineeringComputer Graphic TechniqueComputer Architecture +18

Model-based assistance system for confocal measurements of rough surfaces

Florian Mauch, Wolfram Lyda, W. Osten

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringMeasurementOptical MetrologyComputer-aided DesignCoherent Gradient Sensing +18

A control system for automated multiscale measuring systems

Jan Zimmermann, Oliver Sawodny, Wolfram Lyda, +1

Mechatronics

Sensor CalibrationEngineeringMeasurementCalibrationMechatronics +7

Optical design of a vertically integrated array-type Mirau-based OCT system

Johann Krauter, Tobias Boettcher, Wolfram Lyda, +8

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Optical DesignOptical MaterialsMirau ConfigurationEngineeringOptic Design +21

An assistance system for the selection of sensors in multi-scale measurement systems

Avinash Burla, Tobias Haist, Wolfram Lyda, +1

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringMeasurementOptical TestingEducationSystem Measurement +19

Implementation and analysis of an automated multiscale measurement strategy for wafer scale inspection of micro electromechanical systems

Wolfram Lyda, Avinash Burla, Tobias Haist, +2

International Journal of Precision Engineering and Manufacturing

Electrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationMeasurement +12