Publication | Closed Access
On-wafer investigation of SiC and Si3N4 inclusions in multicrystalline Si grown by directional solidification
33
Citations
7
References
2008
Year
Materials ScienceMaterials EngineeringOn-wafer InvestigationEngineeringApplied PhysicsSiliceneDirectional SolidificationCarbideSemiconductor Device FabricationSolidificationSilicon On InsulatorMicrostructureSi3n4 Inclusions
| Year | Citations | |
|---|---|---|
Page 1
Page 1