Publication | Closed Access
Hard inclusions and their detrimental effects on the wire sawing process of multicrystalline silicon
50
Citations
7
References
2007
Year
Materials ScienceMaterials EngineeringEngineeringHard InclusionsMicrofabricationApplied PhysicsDetrimental EffectsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsMulticrystalline SiliconMicrostructureSilicon Debugging
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