Concepedia

Publication | Closed Access

Using heavy ion backscattering spectrometry (HIBS) to solve integrated circuit manufacturing problems

DOI

12

Citations

1

References

1998

Year

J.C. Banks, Barney L. Doyle, J. A. Knapp, D. Werho, R. B. Gregory, Mark Anthony, Trace Hurd, Alain C. Diebold
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

Page 1