Concepedia

Publication | Closed Access

Computer modelling of magnetron discharges

DOI

65

Citations

47

References

2009

Year

Annemie Bogaerts, E Bultinck, Laurent Schwaederlé, K. Van Aeken, Guy Buyle, Diederik Depla
Journal of Physics D Applied Physics

Abstract

International audience

References

YearCitations

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