Computer modelling of magnetron discharges

Fundamental understanding and modeling of reactive sputtering processes

S. Berg, Tomas Nyberg · Thin Solid Films · 2005 · 699 citations

Engineering, Materials Engineering, Materials Science +10

The metal flux from a rotating cylindrical magnetron: a Monte Carlo simulation

K. Van Aeken, Stijn Mahieu, Diederik Depla · Journal of Physics D Applied Physics · 2008 · 204 citations

Natural Sciences, Materials Science, Physics +15

Understanding the discharge voltage behavior during reactive sputtering of oxides

Diederik Depla, S. Heirwegh, Stijn Mahieu et al. · Journal of Applied Physics · 2007 · 193 citations

Natural Sciences, Materials Science, Physics +16

Experiment and simulation of the compositional evolution of Ti–B thin films deposited by sputtering of a compound target

J. Neidhardt, Stanislav Mráz, Jochen M. Schneider et al. · Journal of Applied Physics · 2008 · 175 citations

Natural Sciences, Materials Engineering, Materials Science +16

Two-component plasma model for two-dimensional glow discharge in magnetic field

Sergey Surzhikov, Joseph S. Shang · Journal of Computational Physics · 2004 · 153 citations

Natural Sciences, Physics, Condensed Matter Physics +15