Thermal annealing study of Au/TiW metallization on silicon

Constitution of Binary Alloys

Max Hansen, K. Anderko, H. W. Salzberg · Journal of The Electrochemical Society · 1958 · 14.8K citations

Natural Sciences, Chemistry, Materials Science +8

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 684 citations

Natural Sciences, Materials Engineering, Materials Science +10

Studies of the Ti-W/Au metallization on aluminum

Ronald S. Nowicki, Joel M. Harris, M‐A. Nicolet et al. · Thin Solid Films · 1978 · 80 citations

Natural Sciences, Materials Engineering, Materials Science +11

Solid-phase crystallization of Si films in contact with Al layers

Joel M. Harris, R. J. Blattner, I. D. Ward et al. · Journal of Applied Physics · 1977 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +17

Improved depth resolution in Auger depth profiling of multilayered thin films by reactive ion sputtering

R. J. Blattner, S.J. Nadel, C. A. Evans et al. · Surface and Interface Analysis · 1979 · 28 citations

Natural Sciences, Materials Science, Physics +12