Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating - Concepedia

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Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating

19

Citations

5

References

2011

Year

Yanhui Zhao, Guoqiang Lin, Jinquan Xiao, Wenchang Lang, Chuang Dong, Jun Gong, Chao Sun

Applied Surface Science

Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied PhysicsThin FilmsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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