3D-structures with arbitrary shapes created in negative resists by grayscale proton beam writing

Pure and doped boron nitride nanotubes

Mauricio Terrones, J. M. Romo-Herrera, Eduardo Cruz‐Silva et al. · Materials Today · 2007 · 312 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Multiphoton polymerization

Linjie Li, John T. Fourkas · Materials Today · 2007 · 178 citations · Full text

Natural Sciences, Materials Science, Microfabrication +15

Three-dimensional nanolithography using proton beam writing

J.A. van Kan, Andrew A. Bettiol, F. Watt · Applied Physics Letters · 2003 · 160 citations

Engineering, Materials Engineering, Materials Science +17

Investigation of gray-scale technology for large area 3D silicon MEMS structures

Christopher M. Waits, A. Modafe, Reza Ghodssi · Journal of Micromechanics and Microengineering · 2002 · 151 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Laser lithographic fabrication and characterization of a spherical artificial compound eye

Daniela Radtke, Jacques Duparré, Uwe D. Zeitner et al. · Optics Express · 2007 · 109 citations · Full text

Engineering, Biomedical Engineering, Manufacturing Engineering +12