Systematic errors in fixed polarizer, rotating polarizer, sample, fixed analyzer spectroscopic ellipsometry

High Precision Scanning Ellipsometer

D. E. Aspnes, A. A. Studna · Applied Optics · 1975 · 644 citations

Natural Sciences, Chemistry, Optical Materials +16

Automatic rotating element ellipsometers: Calibration, operation, and real-time applications

R. W. Collins · Review of Scientific Instruments · 1990 · 279 citations

Natural Sciences, Materials Engineering, Materials Science +15

Precision Bounds to Ellipsometer Systems

D. E. Aspnes · Applied Optics · 1975 · 268 citations

Engineering, Electrical Engineering, Optoelectronics +9

Optimizing precision of rotating-analyzer ellipsometers

D. E. Aspnes · Journal of the Optical Society of America · 1974 · 144 citations

Engineering, Electrical Engineering, Optics +16

Systematic and random errors in rotating-analyzer ellipsometry

Johan Nijs, A. van Silfhout · Journal of the Optical Society of America A · 1988 · 86 citations · Full text

Engineering, Optometry, Instrumentation +12