Microsystem Technologies · 2010 · 28 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceBiomemsMicroelectromechanical SystemsMicrofabricationMicrofabrication ProcessesMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsUltrasonicsBonding TechniquesBonding Temperature EffectsLow-temperature BondingMicrofluidic Chip DesignMicrofluidic Fabrication
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