Sensors and Actuators A Physical · 2006 · 75 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceMagnetic MaterialsPolymer EngineeringPolymer MaterialsMagnetic AnisotropyMagnetic CharacterizationMagnetic SensorsMagnetic Thin FilmsPolymer PhysicsThin Film Magnetic Properties
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A resonantly excited 2D-micro-scanning-mirror with large deflection
Harald Schenk, Peter Dürr, Detlef Kunze et al. · Sensors and Actuators A Physical · 2001 · 108 citations
Micromachined polysilicon microscanners for barcode readers
Meng-Hsiung Kiang, Olav Solgaard, R.S. Muller et al. · IEEE Photonics Technology Letters · 1996 · 81 citations