Concepedia

Parameters determining crystallinity in β-SiC thin films prepared by catalytic chemical vapor deposition

Quanzhong Zhao, Jiahao Li, Hua Zhou, H. Wang, B. Wang, Haoran Yan

Journal of Crystal Growth · 2003 · 26 citations · 12 references

DOI

Concepts

References

12

Deposition of device quality, low <i>H</i> content amorphous silicon

A. H. Mahan, J. J. Carapella, B. P. Nelson et al. · Journal of Applied Physics · 1991 · 481 citations

, , +17

Catalytic Chemical Vapor Deposition (CTC–CVD) Method Producing High Quality Hydrogenated Amorphous Silicon

Hideki Matsumura · Japanese Journal of Applied Physics · 1986 · 189 citations

, , +17

Mechanism of bias-enhanced nucleation of diamond on Si

John Robertson, Julia Gerber, S. Sattel et al. · Applied Physics Letters · 1995 · 126 citations

, , +7

Low-temperature crystallization of amorphous silicon using atomic hydrogen generated by catalytic reaction on heated tungsten

Akira Heya, Atsushi Masuda, Hideki Matsumura · Applied Physics Letters · 1999 · 82 citations · Full text

, , +17

Deposition of cubic SiC films on silicon using dimethylisopropylsilane

Jin‐Hyo Boo, K.‐S. Yu, M. Lee et al. · Applied Physics Letters · 1995 · 44 citations

, , +17