Concepedia

Akira Heya

AH

29

Publications

495

Citations

14

H-Index

1997

Active since

Affiliations

University of Hyogo(Current)

Japan Advanced Institute of Science and Technology

Industrial Research Institute of Ishikawa

Japan Science and Technology Agency

Yamaguchi University

Akira Heya is an author at University of Hyogo specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceChemical EngineeringThin FilmsMaterials EngineeringHydrogenCrystalline DefectsMicrostructure

Publications per year

1997–2020

29

Publications

29

Low-temperature crystallization of amorphous silicon using atomic hydrogen generated by catalytic reaction on heated tungsten

Akira Heya, Atsushi Masuda, Hideki Matsumura · Applied Physics Letters · 1999 · 82 citations

Engineering, Low-temperature Crystallization, Crystal Growth Technology +19

Surface Treatment of Plastic Substrates using Atomic Hydrogen Generated on Heated Tungsten Wire at Low Temperatures

Akira Heya, Naoto Matsuo · Japanese Journal of Applied Physics · 2007 · 26 citations

Engineering, Chemical Engineering, Corrosion +16

Effect of Laser-Plasma X-Ray Irradiation on Crystallization of Amorphous Silicon Film by Excimer Laser Annealing

Naoto Matsuo, Uejukkoku Kazuya, Akira Heya et al. · Japanese Journal of Applied Physics · 2007 · 23 citations

Laser-plasma X-ray Irradiation, Engineering, Laser Applications +19

Cat-CVD SiN passivation films for OLEDs and packaging

Akira Heya, Toshiharu Minamikawa, Toshikazu Niki et al. · Thin Solid Films · 2007 · 23 citations

Engineering, Advanced Packaging (Semiconductors), Applied Physics +3

Preparation of SiN passivation films for PZT ferroelectric capacitors at low substrate temperatures by catalytic CVD

Toshiharu Minamikawa, Yasuto Yonezawa, Akira Heya et al. · Thin Solid Films · 2001 · 21 citations

Materials Engineering, Materials Science, Electrical Engineering +6

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