Optical and crystallographic analysis of thin films of GeC deposited using a unique hollow cathode sputtering technique

Investigation of the rf and dc hollow cathode plasma-jet sputtering systems for the deposition of silicon thin films

Zdeněk Hubička, G. Pribil, R. J. Soukup et al. · Surface and Coatings Technology · 2002 · 36 citations

Natural Sciences, Materials Engineering, Materials Science +12

Thin films of a-SiGe:H with device quality properties prepared by a novel hollow cathode deposition technique

R. J. Soukup, N. J. Ianno, Scott A. Darveau et al. · Solar Energy Materials and Solar Cells · 2004 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +12

Thin films of GeC deposited using a unique hollow cathode sputtering technique

J.S. Schrader, James Huguenin-Love, R. J. Soukup et al. · Solar Energy Materials and Solar Cells · 2006 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +14

Deposition of electronic quality amorphous silicon, <i>a</i>-Si:H, thin films by a hollow cathode plasma-jet reactive sputtering system

G. Pribil, Zdeněk Hubička, R. J. Soukup et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 24 citations

Natural Sciences, Materials Science, Physics +17

Deposition of high quality amorphous silicon, germanium and silicon-germanium thin films by a hollow cathode reactive sputtering system

R. J. Soukup, N. J. Ianno, G. Pribil et al. · Surface and Coatings Technology · 2004 · 20 citations

Engineering, Materials Engineering, Materials Science +16