G. Pribil

Soft Microreactors for the Deposition of Conductive Metallic Traces on Planar, Embossed, and Curved Surfaces

Abhiteja Konda, Advaith V. Rau, Michael A. Stoller et al. · Advanced Functional Materials · 2018 · 54 citations

Engineering, Mechanical Engineering, Curved Surfaces +23

Investigation of the rf and dc hollow cathode plasma-jet sputtering systems for the deposition of silicon thin films

Zdeněk Hubička, G. Pribil, R. J. Soukup et al. · Surface and Coatings Technology · 2002 · 35 citations

Electrical Engineering, Engineering, Silicon Thin Films +8

Deposition of electronic quality amorphous silicon, <i>a</i>-Si:H, thin films by a hollow cathode plasma-jet reactive sputtering system

G. Pribil, Zdeněk Hubička, R. J. Soukup et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 24 citations

Engineering, Thin Film Process Technology, Silicon On Insulator +16

Deposition of high quality amorphous silicon, germanium and silicon-germanium thin films by a hollow cathode reactive sputtering system

R. J. Soukup, N. J. Ianno, G. Pribil et al. · Surface and Coatings Technology · 2004 · 20 citations

Materials Engineering, Materials Science, Silicon-germanium Thin Films +11