Measurement · 2002 · 12 citations · 3 references
EngineeringManufacturing EngineeringMetrologyMicroelectromechanical SystemsMicrofabricationDigital Image ProcessingDimensional MetrologyForm MetrologyGeometric MeasurementImage AnalysisImage ProcessingDigital Image AnalysisImage MeasurementMicro-metrologySize MeasurementThree-dimensional Metrology
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