Structural and mechanical properties of sputtered cubic and hexagonal NbN thin films

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

Hard and superhard nanocomposite coatings

J. Musil · Surface and Coatings Technology · 2000 · 1.1K citations

Natural Sciences, Materials Engineering, Materials Science +12

A concept for the design of novel superhard coatings

S. Vepřek, S. Reiprich · Thin Solid Films · 1995 · 959 citations

Engineering, Materials Engineering, Materials Science +12

Revised structure zone model for thin film physical structure

R. Messier, Anupam Giri, R. Roy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 945 citations

Natural Sciences, Materials Science, Physics +12

The deposition of NbN and NbC thin films by filtered vacuum cathodic arc deposition

Avi Bendavid, Phil Martin, T.J. Kinder et al. · Surface and Coatings Technology · 2002 · 96 citations

Natural Sciences, Materials Engineering, Materials Science +9