Publication | Closed Access
The deposition of NbN and NbC thin films by filtered vacuum cathodic arc deposition
95
Citations
22
References
2002
Year
Materials ScienceEngineeringMicrofabricationSurface ScienceApplied PhysicsVacuum DeviceNbc Thin FilmsThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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