Concepedia

Publication | Closed Access

Precipitation, ripening and chemical effects during annealing of Ge+ implanted SiO2 layers

DOI

118

Citations

10

References

1999

Year

K.‐H. Heinig, Bernd Schmidt, A. Markwitz, R. Grötzschel, Matthias Strobel, Steffen Oswald
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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