Precipitation, ripening and chemical effects during annealing of Ge+ implanted SiO2 layers

K.‐H. Heinig, Bernd Schmidt, A. Markwitz, R. Grötzschel, Matthias Strobel, Steffen Oswald

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 118 citations · 10 references

Concepts

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