Thin Solid Films · 1984 · 20 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAmorphous MaterialsAmorphous SemiconductorsAmorphous SolidsSemiconductor PhysicsSemiconductor Thin FilmsThin-film MaterialsAmorphous SiliconHydrogenated Amorphous SiliconSilicon Carbide
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