Publication | Closed Access
The roles of hydrophobic group on the surface of ultra low dielectric constant porous silica film during thermal treatment
23
Citations
27
References
2007
Year
Materials ScienceThermal TreatmentEngineeringNanoporous MaterialSurface ScienceApplied PhysicsPorous MembranePorositySurface ModificationHydrophobic GroupElectrical Insulation
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