Concepedia

The roles of hydrophobic group on the surface of ultra low dielectric constant porous silica film during thermal treatment

Jen‐Tsung Luo, Wen-Fa Wu, Hua‐Chiang Wen, Ben‐Zu Wan, Yu‐Ming Chang, Chang‐Pin Chou, Junming Chen, Wu-Nan Chen

Thin Solid Films · 2007 · 23 citations · 27 references

DOI

Concepts

References

27

Modification of MCM-41 by Surface Silylation with Trimethylchlorosilane and Adsorption Study

Xin Zhao, Gao Qing Lu · The Journal of Physical Chemistry B · 1998 · 506 citations

, , +17

Infrared spectra-structure correlations for organosilicon compounds

A. Lee Smith · Spectrochimica Acta · 1960 · 465 citations

, , +10

Low-temperature growth of silicon dioxide films: A study of chemical bonding by ellipsometry and infrared spectroscopy

G. Lucovsky, M. J. Mantini, J. K. Srivastava et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 395 citations

, , +17

The Analytical Chemistry of Silicones

W. van der Linden · Analytica Chimica Acta · 1992 · 241 citations

, , +4

Surface chemistry and trimethylsilyl functionalization of Stöber silica sols

Tayyab I. Suratwala, M.Leslie Hanna, Eric L. Miller et al. · Journal of Non-Crystalline Solids · 2003 · 125 citations

, , +16