Publication | Closed Access
Properties of polymeric layers of hydrogenated amorphous carbon produced by a plasma-activated chemical vapour deposition process II: Tribological and mechanical properties
153
Citations
12
References
1986
Year
Materials ScienceTribological CoatingChemical EngineeringEngineeringPolymeric LayersDeposition Process IiAmorphous SolidChemical Vapor DepositionPlasma ProcessingPlasma-activated Chemical Vapour
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