The growth of carbon films with random atomic structure from ion impact damage in a hydrocarbon plasma

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

S. Aisenberg, Ronald Chabot · Journal of Applied Physics · 1971 · 1.2K citations

Materials Science, Materials Engineering, Electrical Engineering +14

Growth of Diamond Seed Crystals by Vapor Deposition

John C. Angus, Wayne S. Stanko · Journal of Applied Physics · 1968 · 398 citations

Materials Science, Diamond-like Carbon, Engineering +12

Ion-beam-deposited polycrystalline diamondlike films

E. G. Spencer, P. H. Schmidt, DC Joy et al. · Applied Physics Letters · 1976 · 312 citations

Materials Science, Diamond-like Carbon, Ion Implantation +12

Electrical, structural and optical properties of amorphous carbon

J. J. Hauser · Journal of Non-Crystalline Solids · 1977 · 230 citations

Materials Science, Amorphous Carbon, Optical Materials +4

Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasma

L. Holland, S.M. Ojha · Thin Solid Films · 1976 · 207 citations

Materials Science, Engineering, Surface Science +6