Progress in material removal mechanisms of surface polishing with ultra precision

Chemical processes in glass polishing

Lee M. Cook · Journal of Non-Crystalline Solids · 1990 · 989 citations

Natural Sciences, Chemistry, Materials Science +11

The Theory and Design of Plate Glass Polishing Machines

F. W. Preston · Medical Entomology and Zoology · 1927 · 740 citations

Engineering, Manufacturing Engineering, Materials Engineering +6

Material removal mechanism in chemical mechanical polishing: theory and modeling

Jianfeng Luo, David Dornfeld · IEEE Transactions on Semiconductor Manufacturing · 2001 · 641 citations

Engineering, Materials Engineering, Materials Science +16

Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects

F. B. Kaufman, Daniel B. Thompson, R. E. Broadie et al. · Journal of The Electrochemical Society · 1991 · 511 citations

Engineering, Materials Engineering, Materials Science +17

Mechanism of polishing of SiO2 films by CeO2 particles

Tetsuya Hoshino, Y. Kurata, Yuuki Terasaki et al. · Journal of Non-Crystalline Solids · 2001 · 306 citations

Natural Sciences, Materials Engineering, Materials Science +14