Review of Scientific Instruments · 1992 · 26 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface ScienceThin FilmsCoatingsSurface CharacterizationSurface PhysicsThin Film Optical PropertiesThin-film DepositionThin-film MaterialsDielectric FunctionMaterial ReflectivityMulti-layer CoatingsRoughnessSputteringSputtering TechniquesX-ray ReflectionX-ray Reflectivity
Characteristics of Ti/Be multilayers deposited by laser sputtering were investigated by grazing incidence x-ray reflection. The reflectivity of mirrors was explained using exponential variation of dielectric function, the validity of scattering model was confirmed by synchrotron radiation reflectivity measurements at 1200 eV. The observed quasi-Bragg peaks were interpreted in terms of nonspecular scattering from interfacial roughness.
9
Surface Studies of Solids by Total Reflection of X-Rays
L. G. Parratt · Physical Review · 1954 · 5.1K citations
X-ray and neutron scattering from rough surfaces
S. K. Sinha, E. B. Sirota, Stephen Garoff et al. · Physical review. B, Condensed matter · 1988 · 2.4K citations
Natural Sciences, Physics, Optics +16