<title>Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating</title>

Abstract

The influence of thickness errors and boundary imperfections on the performance of a multilayer x-ray mirror is discussed, and it is shown that both can be obtained separately from a measured reflectivity curve at a short x-ray wavelength. Multilayers have greatly reduced scattering compared to single films, and for this reason rough boundaries and gradual transition layers between the film materials give practically identical performance. A simple Debye-Waller factor is not sufficient to describe the performance of a multi-layer with many layers at short wavelengths.