Thin Solid Films · 2007 · 12 citations · 6 references
EngineeringMaterials EngineeringMaterials ScienceOpticsPhotonicsSemiconductor MaterialsOptoelectronic DevicesOptoelectronic MaterialsPhotonic CrystalsPhotonic MaterialsSemiconductor Crystal GrowthSemiconductor Device MaterialsDevice FabricationFocused Ion Beam LithographyFocused Ion Beam MachiningFocused Ion Beam PatterningPhotonic Crystal Devices
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