Publication | Closed Access
Effect of nitrogen content on the microstructure and mechanical properties of CNx thin films
18
Citations
9
References
2003
Year
Materials ScienceCnx Thin FilmsEngineeringMechanical PropertiesNanomaterialsMaterial PropertyMechanical EngineeringApplied PhysicsThin FilmsCarbon NanotubesThin Film ProcessingNitrogen Content
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