Properties of high sensitivity ZnO surface acoustic wave sensors on SiO2/(100) Si substrates - Concepedia

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Properties of high sensitivity ZnO surface acoustic wave sensors on SiO2/(100) Si substrates

83

Citations

23

References

2008

Year

Soumya Krishnamoorthy, Agis A. Iliadis

Solid-State Electronics

Materials ScienceElectrical EngineeringEngineeringSensorsSi SubstratesSurface ScienceApplied PhysicsSensor DesignAcoustic SensorUltrasoundSensor TechnologyPlanar Waveguide SensorMicromachined Ultrasonic Transducer

References

	Year	Citations

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