Publication | Closed Access
VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors
26
Citations
6
References
2011
Year
Unknown Venue
Chemical EngineeringEngineeringAnalytical InstrumentationGas ChromatographyMicrofabricationBiomedical DiagnosticsGas SensorAnalytical MicrosystemsNano Electro Mechanical SystemLab-on-a-chipAnalytical ChemistryChemistryInstrumentationNems ResonatorsMicroelectronicsNems DetectorsMicrofluidicsPortable Multi-gas Analyzer
This work demonstrates for the first time a VLSI-compatible nano/microfabricated, high-performance, portable multi-gas analyzer associating gas chromatography and NEMS resonators.
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