Concepedia

VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors

Julien Arcamone, Antoine Niel, V. Gouttenoire, Marie Petitjean, N. David, Régis Barattin, Muriel Matheron, Florence Ricoul, Thomas Bordy, Henri Blanc,

2011 · 26 citations · 7 references

DOIFull text

Open access

Concepts

Abstract

This work demonstrates for the first time a VLSI-compatible nano/microfabricated, high-performance, portable multi-gas analyzer associating gas chromatography and NEMS resonators.

References

7

Applications and Advances in Electronic-Nose Technologies

A. D. Wilson, Manuela Baietto · Sensors · 2009 · 1.1K citations · Full text

, , +11

Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications

Mo Li, Hong X. Tang, M. L. Roukes · Nature Nanotechnology · 2007 · 1K citations

, , +14

Nanoelectromechanical Resonator Arrays for Ultrafast, Gas-Phase Chromatographic Chemical Analysis

Mo Li, E. Myers, Hong X. Tang et al. · Nano Letters · 2010 · 168 citations

, , +16

In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection

HAL (Le Centre pour la Communication Scientifique Directe) · 2010 · 120 citations · Full text

, , +17

Sensitive detection of nanomechanical motion using piezoresistive signal downmixing

Igor Bargatin, E. B. Myers, Jessica Arlett et al. · Applied Physics Letters · 2005 · 118 citations · Full text

, , +17