Desktop nanofabrication with massively multiplexed beam pen lithography

"Dip-Pen" Nanolithography

Richard D. Piner, Jin Zhu, Feng Xu et al. · Science · 1999 · 3K citations

Natural Sciences, Materials Engineering, Materials Science +15

Near-Field Optics: Microscopy, Spectroscopy, and Surface Modification Beyond the Diffraction Limit

Eric Betzig, J. K. Trautman · Science · 1992 · 1.8K citations

Engineering, Bioengineering, Biomedical Engineering +17

Superlenses to overcome the diffraction limit

Xiang Zhang, Zhaowei Liu · Nature Materials · 2008 · 1.3K citations

Natural Sciences, Materials Science, Physics +10

Electron beam lithography: resolution limits and applications

Christophe Vieu, F. Carcenac, A. Pépin et al. · Applied Surface Science · 2000 · 1.1K citations

Engineering, Materials Engineering, Materials Science +14

Projection micro-stereolithography using digital micro-mirror dynamic mask

Cheng Sun, Nicholas X. Fang, Dong Wu et al. · Sensors and Actuators A Physical · 2005 · 865 citations

Engineering, Manufacturing Engineering, Microelectromechanical Systems +10