Publication | Open Access
Desktop nanofabrication with massively multiplexed beam pen lithography
97
Citations
23
References
2013
Year
Desktop NanofabricationEngineeringElectron-beam LithographyBeam LithographyMicrofabricationNanotechnologyApplied PhysicsNanolithographyNanofabrication3D PrintingNanolithography Method
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