Polyimide amplified piezoelectric scanning mirror for spectral domain optical coherence tomography

Abstract

The authors present polyimide amplified piezoelectric bimorph scanning mirrors for application in optical coherence tomography (oct). These devices use piezoelectric bimorph actuators to drive microfabricated polyimide structures at resonance. These devices have tilting tables (either 1.125 or 2.25mm wide) that tilt on 3μm thick torsion hinges to amplify the motion of the bimorph actuators and produce large scan ranges. These devices have been integrated into the scanning arm of a spectral domain OCT imaging system. Preliminary in vivo images have been obtained with scans of 40°–50° at real-time imaging rates of 25–41frames∕s.