Germanium effect on void defects in Czochralski silicon

The mechanism of swirl defects formation in silicon

V. V. Voronkov · Journal of Crystal Growth · 1982 · 511 citations

Natural Sciences, Materials Engineering, Materials Science +11

Crystal-Originated Singularities on Si Wafer Surface after SC1 Cleaning

Jiro Ryuta, E. Morita, Toshiro Tanaka et al. · Japanese Journal of Applied Physics · 1990 · 229 citations

Natural Sciences, Materials Science, Electronic Materials +12

Recognition of D defects in silicon single crystals by preferential etching and effect on gate oxide integrity

Hiroshi Yamagishi, I. Fusegawa, N. Fujimaki et al. · Semiconductor Science and Technology · 1992 · 169 citations

Engineering, Electrical Engineering, Materials Science +17

First-principles calculation of the interaction between nitrogen atoms and vacancies in silicon

Hideaki Sawada, Kazuto Kawakami · Physical review. B, Condensed matter · 2000 · 111 citations

Natural Sciences, Materials Science, Physics +17

Observation of Lattice Defects in GaAs and Heat-treated Si Crystals by Infrared Light Scattering Tomography

Kazuo Moriya, Tomoya Ogawa · Japanese Journal of Applied Physics · 1983 · 95 citations

Natural Sciences, Materials Engineering, Materials Science +17