Concepedia

I. Fusegawa

IF

2

Publications

187

Citations

2

H-Index

1992

Active since

Affiliations

ShinEtsu Chemical (Japan)(Current)

I. Fusegawa is an author at ShinEtsu Chemical (Japan) specializing in physics, applied physics, and engineering.

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Publications per year

1992–1992

2

Publications

2

Recognition of D defects in silicon single crystals by preferential etching and effect on gate oxide integrity

Hiroshi Yamagishi, I. Fusegawa, N. Fujimaki et al. · Semiconductor Science and Technology · 1992 · 168 citations

, , +16

Evaluation of interstitial oxygen along striations in CZ silicon single crystals with a micro-FTIR mapping system

I. Fusegawa, Hiroshi Yamagishi · Semiconductor Science and Technology · 1992 · 19 citations

, , +16

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