XPS study of sputtered alumina thin films

Handbook of X-Ray Photoelectron Spectroscopy

J. F. Moulder · Medical Entomology and Zoology · 1995 · 23.7K citations

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Thermal stability of sputtered Al2O3 coatings

V. Edlmayr, Martin Möser, C. Walter et al. · Surface and Coatings Technology · 2009 · 150 citations

Natural Sciences, Materials Engineering, Materials Science +14

Dielectric properties of DC reactive magnetron sputtered Al2O3 thin films

S. Prasanna, Mohan Rao G, S. Jayakumar et al. · Thin Solid Films · 2011 · 63 citations

Natural Sciences, Materials Engineering, Materials Science +15

Voltage controlled reactive sputtering process for aluminium oxide thin films

Kari Koski, Jorma Hölsä, P. Juliet · Thin Solid Films · 1998 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +13

Characterization and adhesion study of thin alumina coatings sputtered on PET

R. Cueff, G. Baud, M. Benmalek et al. · Thin Solid Films · 1995 · 36 citations

Natural Sciences, Materials Engineering, Materials Science +14