Concepedia

Dielectric properties of DC reactive magnetron sputtered Al2O3 thin films

S. Prasanna, Mohan Rao G, S. Jayakumar, M.D. Kannan, V. Ganesan

Thin Solid Films · 2011 · 63 citations · 28 references

DOI

Concepts

References

28

Electronic Band Structure of Al <sub>2</sub> O <sub>3</sub> , with Comparison to Alon and AIN

Roger H. French · Journal of the American Ceramic Society · 1990 · 516 citations

, , +17

Electronic properties of amorphous dielectric films

A.K. Jonscher · Thin Solid Films · 1967 · 454 citations

, , +12

Dielectric properties of thin films of aluminium oxide and silicon oxide

F. Argall, A.K. Jonscher · Thin Solid Films · 1968 · 259 citations

, , +17

Thermal stability of alumina thin films containing γ-Al2O3 phase prepared by reactive magnetron sputtering

J. Musil, J. Blažek, P. Zeman et al. · Applied Surface Science · 2010 · 133 citations

, , +16

Dielectric properties of aluminum oxide films

Hülyâ Birey · Journal of Applied Physics · 1978 · 131 citations

, , +17