Quantitative X‐ray fluorescence analysis of thin films using LAMA‐2

Abstract

Abstract An improved version of the LAMA program for the quantitative analysis of composition and mass thickness of thin film materials by X‐ray fluorescence (XRF) has been developed. The divergence and slow convergence problems occasionally experienced with the LAMA‐1 program have been eliminated by using the linear approximation method and the algorithm of simultaneous refinement of composition and thickness to greatly increase its capability and performance. A study of over a hundred simulated thin films showed that the LAMA‐2 program converged much faster than LAMA‐1 and gave better accuracy. The efficiency of the program has been improved to the point where it is feasible to operate on a minicomputer.