Deposition of High Purity Parylene- F Using Low Pressure Low Temperature Chemical Vapor Deposition

Deposition of amorphous fluoropolymer thin films by thermolysis of Teflon amorphous fluoropolymer

T. C. Nason, James A. Moore, T.‐M. Lu · Applied Physics Letters · 1992 · 102 citations

Engineering, Amorphous Fluoropolymer, Thin Film Process Technology +16

The parylene-aluminum multilayer interconnection system for wafer scale integration and wafer scale hybrid packaging

Nurhalis Majid, S. Dabral, J. F. McDonald · Journal of Electronic Materials · 1989 · 78 citations

Materials Science, 3D Ic Architecture, Electrical Engineering +10

1,1,2,2,9,9,10,10-Octafluoro[2,2]paracyclophane

Sui-Wu. Chow, L. A. Pilato, W. L. Wheelwright · The Journal of Organic Chemistry · 1970 · 46 citations

Altmetrics, Molecular Sciences, Engineering +11

Thermogravimetry and differential scanning calorimetry of some poly-p-xylylenes containing halogen atoms

B. L. Joesten · Journal of Applied Polymer Science · 1974 · 46 citations

Engineering, Differential Scanning Calorimetry, Aromatic Chlorine Atoms +20

Vapor deposition of parylene-F by pyrolysis of dibromotetrafluoro-<i>p</i>-xylene

Lü You, G.-R. Yang, Chi-I Lang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 44 citations

Materials Science, Chemical Engineering, Fourier Transform +15