Effects of a quartz beam-guide on high-precision laser-assisted etching of Al2O3 ceramics

Multiple photon excited SF6 interaction with silicon surfaces

T. J. Chuang · The Journal of Chemical Physics · 1981 · 113 citations

Natural Sciences, Chemistry, Materials Science +17

Localized laser etching of compound semiconductors in aqueous solution

Richard M. Osgood, Antonio Sanchez‐Rubio, D. J. Ehrlich et al. · Applied Physics Letters · 1982 · 99 citations

Engineering, Materials Engineering, Materials Science +17

Laser enhanced etching in KOH

R. J. von Gutfeld, R. T. Hodgson · Applied Physics Letters · 1982 · 96 citations

Engineering, Materials Engineering, Materials Science +16

Deep-ultraviolet induced wet etching of GaAs

D. V. Podlesnik, H. H. Gilgen, Richard M. Osgood · Applied Physics Letters · 1984 · 79 citations

Engineering, Materials Engineering, Materials Science +13

Infrared laser radiation effects on XeF2 interaction with silicon

T. J. Chuang · The Journal of Chemical Physics · 1981 · 49 citations

Natural Sciences, Chemistry, Materials Science +17