Concepedia

Electrically separated two-axis MEMS mirror array module for wavelength selective switches

Mitsuo Usui, S. Uchiyama, Etsu Hashimoto, Koichi Hadama, Yuzo Ishii, Nobuaki Matsuura, Tomomi Sakata, Nobuhiro Shimoyama, Yasuhiro Sato, Tohru Matsuura,

2009 · 16 citations · 3 references

DOI

Concepts

PhotonicsElectrical EngineeringEngineeringOptical PropertiesElectrical InterferenceNew Electrode StructureGuided-wave OpticOptical SwitchingMicro-electromechanical SystemMicroelectronicsOptoelectronicsWavelength Selective SwitchesElectro-optics Device

Abstract

A novel two-axis MEMS mirror array module for wavelength selective switches feature a new electrode structure that reduces electrical interference between adjacent channels. The fabricated 50-channel mirror module has good characteristics satisfying system requirements.

References

3

WSS Switching Engine Technologies

Pierre Wall, Paul Colbourne, Christopher Reimer et al. · 2008 · 46 citations

Photonics, Electrical Engineering, Engineering +11

Open-loop operation of MEMS WDM routers with analog micromirror array

Shiang‐Suo Huang, Jui-che Tsai, Dooyoung Hah et al. · IEEE/LEOS International Conference on Optical MEMS · 2003 · 25 citations

Optical Materials, Engineering, Integrated Circuits +17

Integrated 1&#x00D7;4 wavelength-selective switch with on-chip MEMS micromirrors

Jui-che Tsai, M.-C.M. Lee, Dooyoung Hah et al. · 2005 · 10 citations