Scripta Materialia · 2009 · 13 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceCatalysisNanomaterialsNanotechnologyChemical Vapor DepositionNanomaterials SynthesisNanoparticle SynthesisNanoscale MaterialsSemiconductor NanomaterialsThin-film DepositionNanocrystal SynthesisNanocrystalsNitride Thin FilmsSiliconSilicon NanocrystalsSilicon NanostructuresSilicon NitrideSize Control
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