Concepedia

Dynamic Monte Carlo simulation for reactive sputtering of aluminium

Z.Y Chen, Annemie Bogaerts, Diederik Depla, V. A. Ignatova

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 25 citations · 15 references

DOI

Concepts

References

15

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 916 citations

, , +8

Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solids

W. Möller, W. Eckstein, J.P. Biersack · Computer Physics Communications · 1988 · 607 citations

, , +16

Model of energetic electron transport in magnetron discharges

T. E. Sheridan, Matthew Goeckner, J. Goree · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 143 citations

, , +16

The surface binding energy in slow collisional sputtering

Roger Kelly · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 70 citations

, , +10

Analysis of Three-Dimensional DC Magnetron Discharge by the Particle-in-Cell/Monte Carlo Method

Kenichi Nanbu, Shuji Kondo · Japanese Journal of Applied Physics · 1997 · 57 citations

, , +10