Concepedia
Thin Solid Films · 2012 · 25 citations · 27 references
Materials ScienceMaterials EngineeringEngineeringCrystalline DefectsApplied PhysicsAmorphous Silicon Thin-filmGlass SubstrateThin Film Process TechnologyThin FilmsAmorphous SolidThin Film ProcessingXe Arc FlashAmorphous Materials
27
Dislocation Etch for (100) Planes in Silicon
F. Secco d' Aragona · Journal of The Electrochemical Society · 1972 · 656 citations
Materials Engineering, Materials Science, Engineering +15
Phase transformation mechanisms involved in excimer laser crystallization of amorphous silicon films
James S. Im, Hyun Jae Kim, Michael O. Thompson · Applied Physics Letters · 1993 · 528 citations
Materials Engineering, Materials Science, Epitaxial Growth +15
Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization
Seok-Woon Lee, Seung‐Ki Joo · IEEE Electron Device Letters · 1996 · 453 citations
Materials Science, Materials Engineering, Electrical Engineering +13
Recrystallization of amorphized polycrystalline silicon films on SiO2: Temperature dependence of the crystallization parameters
R.B. Iverson, R. Reif · Journal of Applied Physics · 1987 · 359 citations · Full text
Engineering, Temperature Dependence, Polycrystalline Silicon Films +18
On the super lateral growth phenomenon observed in excimer laser-induced crystallization of thin Si films
James S. Im, Hyun Jae Kim · Applied Physics Letters · 1994 · 219 citations
Excimer Laser-induced Crystallization, Optical Materials, Engineering +19