Sensors and Actuators B Chemical · 2009 · 55 citations · 19 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsElectromagnetismMicrofabricationControl ValvesMagnetic ActuationMagnetic ActuatorsMems ActuatorsMicrofabrication ProcessesRotary ActuatorsMagnetic MicroactuatorsMagnetic MicromotorsMagnetic-field-assisted AssemblyMagnetically Actuated ControlMicropumps
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Thin-film shape-memory alloy actuated micropumps
William L. Benard, H. Kahn, A. H. Heuer et al. · Journal of Microelectromechanical Systems · 1998 · 375 citations
Fabrication of a peristaltic PDMS micropump
Ok Chan Jeong, Sin Wook Park, Sang Sik Yang et al. · Sensors and Actuators A Physical · 2005 · 120 citations