Concepedia

Film characterization of titanium oxide films prepared by high-power impulse magnetron sputtering

F.J. Jing, Ken Yukimura, H. Kato, Yifeng Lei, Tao You, Y.X. Leng, Nan-Sheng Huang

Surface and Coatings Technology · 2011 · 14 citations · 16 references

DOI

Concepts

References

16

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1.1K citations

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Hemocompatibility of titanium oxide films

Nan Huang, P. Yang, Y.X. Leng et al. · Biomaterials · 2003 · 404 citations

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Target material pathways model for high power pulsed magnetron sputtering

D.J. Christie · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 290 citations

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High power pulsed magnetron sputtered CrN films

Arutiun P. Ehiasarian, W.‐D. Münz, Lars Hultman et al. · Surface and Coatings Technology · 2002 · 272 citations

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Ionization of sputtered metals in high power pulsed magnetron sputtering

Johan Böhlmark, Jones Alami, Chris Christou et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 256 citations

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