Frictional study of micromotor bearings

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

The Evolution of Silicon Wafer Cleaning Technology

Werner Kern · Journal of The Electrochemical Society · 1990 · 1.7K citations

Engineering, Electrical Engineering, Materials Science +17

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

Friction—The Present State of Our Understanding

David Tabor · Journal of Lubrication Technology · 1981 · 334 citations

Engineering, Materials Engineering, Materials Science +15

In situ friction and wear measurements in integrated polysilicon mechanisms

K.J. Gabriel, F. Behi, R. Mahadevan et al. · Sensors and Actuators A Physical · 1990 · 171 citations

Engineering, Materials Engineering, Materials Science +14