Formal databases for surface analysis: The current situation and future trends

Abstract

Abstract Evaluated data are needed for surface analysis, just as for other measurements, so that analyses can be made reliably and effectively. Until recently, the principal sources of data were handbooks of spectra (mainly of elements) and review articles with values or equations for the parameters needed. This article describes three efforts to develop formal databases that can be incorporated into computer systems. Information is first given on a recently announced x‐ray photoelectron spectroscopy database, which contains over 13000 line positions, chemical shifts and splittings, together with associated software for searching by element, line type, line energy and other variables. Second, a summary is presented of a recent compilatation of evaluated elemental ion sputtering yields for applications in sputter depth profiling and secondary ion mass spectrometry. Finally, a description is given of a new database that is to contain Auger electron spectra and x‐ray photoelectron spectra; the database architecture is being designed also to accommodate depth profiles and the results of measurements by other surface analysis techniques.