Publication | Closed Access
A universal relation for the sputtering yield of monatomic solids at normal ion incidence
306
Citations
8
References
1984
Year
Materials ScienceMaterials EngineeringIon ImplantationEngineeringPhysicsSurface ScienceApplied PhysicsNormal Ion IncidenceSputtering YieldAtomic PhysicsIon BeamUniversal RelationVacuum DeviceIon Emission
| Year | Citations | |
|---|---|---|
Page 1
Page 1