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Deposition of AlN films onto Fe-Al-Mn alloys by reactive r.f. magnetron sputtering

Materials EngineeringMagnetismFerromagnetismMaterials ScienceAln FilmsEngineeringAluminium NitrideCorrosionApplied PhysicsLight MetalThin FilmsFe-al-mn AlloysMagnetic MaterialReactive R.fMicrostructure